16874-34-3, Name is Ethyl tetrahydrofuran-2-carboxylate, belongs to tetrahydrofurans compound, is a common compound. COA of Formula: C7H12O3In an article, once mentioned the new application about 16874-34-3.
Novel ester compounds having formula (1) wherein A1 is a polymerizable functional group having a double bond, A2 is furandiyl, tetrahydrofurandiyl or oxanorbornanediyl, R1 and R2 each are a monovalent hydrocarbon group, or R1 and R2 may bond together to form an aliphatic hydrocarbon ring with the carbon atom, and R3 is hydrogen or a monovalent hydrocarbon group which may contain a hetero atom are polymerizable into polymers. Resist compositions comprising the polymers are sensitive to high-energy radiation, have an improved sensitivity, resolution, and etching resistance, and lend themselves to micropatterning with electron beams or deep-UV rays. 1
Do you like my blog? If you like, you can also browse other articles about this kind. Thanks for taking the time to read the blog about 16874-34-3
Reference：
Tetrahydrofuran – Wikipedia,
Tetrahydrofuran | (CH2)3CH2O – PubChem